RF impedance matching network

ABSTRACT

An RF impedance matching network includes a transformation circuit configured to provide a transformed impedance; a first shunt circuit in parallel to the RF input, the first shunt circuit including a first shunt variable capacitance component comprising (a) a plurality of first shunt capacitors coupled in parallel, and (b) a plurality of first shunt switches coupled to the plurality of first shunt capacitors and configured to connect and disconnect each of the plurality of first shunt capacitors to a first virtual ground; and a second shunt variable capacitance component including (a) a plurality of second shunt capacitors coupled in parallel, and (b) a plurality of second shunt switches coupled to the plurality of second shunt capacitors and configured to connect and disconnect each of the plurality of second shunt capacitors to a second virtual ground.

CROSS REFERENCE TO RELATED APPLICATIONS

The present application claims priority to U.S. Provisional PatentApplication Ser. No. 62/118,552 filed Feb. 20, 2015, the disclosure ofwhich is incorporated herein by reference in its entirety.

FIELD OF THE INVENTION

The field of the present invention relates to systems and methods forproviding an RF impedance matching network.

BACKGROUND OF THE INVENTION

Semiconductor devices can include microprocessors, memory chips, andother types of integrated circuits and devices. The semiconductor devicefabrication process uses plasma processing at different stages of theprocess. Plasma processing involves energizing a gas mixture byimparting energy to the gas molecules by introducing RF (radiofrequency) energy into the gas mixture. This gas mixture is typicallycontained in a vacuum chamber, referred to as a plasma chamber, and theRF energy is typically introduced into the plasma chamber throughelectrodes.

In a typical plasma process, the RF generator generates power at a radiofrequency—which is broadly understood as being within the range of 3 kHzand 300 GHz—and this power is transmitted through RF cables and networksto the plasma chamber. In order to provide efficient transfer of powerfrom the RF generator to the plasma chamber, an intermediary circuit isused to match the fixed impedance of the RF generator with the variableimpedance of the plasma chamber. Such an intermediary circuit iscommonly referred to as an RF impedance matching network, or more simplyas an RF matching network.

The purpose of the RF matching network is to enable the variable plasmaimpedance to a value that more closely matches the fixed impedance ofthe RF generator. In many cases, particularly in semiconductorfabrication processes, the system impedance of the RF generator is fixedat 50 Ohms, and RF power is transmitted through coaxial cables whichalso have a fixed impedance of 50 Ohms. Unlike the impedance of the RFgenerator and the coaxial cables, the impedance of the plasma, which isdriven by the RF power, varies. In order to effectively transmit RFpower from the RF generator and the coaxial cables to the plasmachamber, the impedance of the plasma chamber must be transformed tonon-reactive 50 Ohms (i.e., 50+j0). Doing so will help maximize theamount of RF power transmitted into the plasma chamber.

The typical RF matching network includes variable capacitors and acontrol unit with a microprocessor and field-programmable gate array(FPGA) to control the capacitance values of the variable capacitors. Thevalue and size of the variable capacitors within the RF matching networkare determined by the power handling capability, frequency of operation,and impedance range of the plasma chamber. The predominant type ofvariable capacitor used in RF matching network applications is a VacuumVariable Capacitor (VVC). The VVC is an electromechanical device proneto mechanical failures.

As semiconductor devices shrink in size and become more complex, thefeature geometries become very small. As a result, the processing timefor each individual step needed to fabricate these small features haslikewise been reduced—typically in the range of 5˜6 s. RF matchingnetworks which use VVCs generally take in the range of 1˜2 s to matchthe plasma chamber impedance to the RF generator impedance. During asignificant amount of the matching process, which includes themicroprocessor and FPGA determining the capacitances for the VVCs neededto create the match, controlling the VVCs to the achieve the determinedcapacitances, and then finally time for the RF matching network circuitsto stabilize with the new capacitances, the fabrication processparameters are unstable, and these unstable process parameters must beaccounted for as part of the overall fabrication process. Because thematching process time is becoming a more and more significant part ofthe time for each fabrication process step, the period in which processparameters are unstable becomes more of a factor in the overallfabrication process.

While Electronically Variable Capacitor (EVC) technology is known (seeU.S. Pat. No. 7,251,121, the disclosure of which is incorporated hereinby reference in its entirety), it has yet to be developed into anindustry-accepted replacement for VVCs. Because an EVC is purely anelectronic device, an EVC is not a one-for-one replacement for a VVC inan RF matching network. Further, matching networks employing EVCs oftenhave drawbacks, including difficulty handling the voltage stresses thatoccur in high-power applications. Thus, advancements are thereforeneeded to more fully take advantage of using EVCs and other variableelectronic devices as part of an RF matching network.

SUMMARY OF THE INVENTION

The present invention is directed toward systems and methods forproviding an impedance matching network. Such a matching network can beadvantageously employed in semiconductor fabrication systems andprocesses.

In a first aspect of the present invention, an RF impedance matchingnetwork includes an RF input configured to couple to an RF source, theRF source having a fixed RF source impedance; an RF output configured tocouple to a load, the load having a variable load impedance; atransformation circuit coupled to the RF input and configured to providea transformed impedance that is less than the RF fixed source impedance,the transformation circuit comprising: a transformation capacitor inseries with the RF input; and a transformation inductor in parallel tothe RF input and coupled to a ground; a series inductor in series withthe RF input and coupled between the transformation capacitor and the RFoutput; a first shunt circuit in parallel to the RF input, the firstshunt circuit comprising: a first shunt variable capacitance componentcomprising (a) a plurality of first shunt capacitors coupled inparallel, and (b) a plurality of first shunt switches coupled to theplurality of first shunt capacitors and configured to connect anddisconnect each of the plurality of first shunt capacitors to a firstvirtual ground; a first shunt padding capacitor coupled in parallel toat least one of the plurality of first shunt capacitors, the first shuntpadding capacitor coupled to the first virtual ground; a first shuntground capacitor coupled between the first virtual ground and theground; and a first shunt resistor coupled between the first virtualground and the ground; a second shunt circuit in parallel to the RFoutput, the second shunt circuit comprising: a second shunt variablecapacitance component comprising (a) a plurality of second shuntcapacitors coupled in parallel, and (b) a plurality of second shuntswitches coupled to the plurality of second shunt capacitors andconfigured to connect and disconnect each of the plurality of secondshunt capacitors to a second virtual ground; a second shunt paddingcapacitor coupled in parallel to at least one of the plurality of secondshunt capacitors, the second shunt padding capacitor coupled to thesecond virtual ground; a second shunt ground capacitor coupled betweenthe second virtual ground and the ground; and a second shunt resistorcoupled between the second virtual ground and the ground.

In a second aspect of the present invention, a method of matching animpedance includes determining a variable load impedance of a load, withan impedance matching network coupled between the load and an RF source,wherein the RF source has a fixed RF source impedance, and the impedancematching network comprises: an RF input configured to couple to the RFsource; an RF output configured to couple to the load; a transformationcircuit coupled to the RF input and configured to provide a transformedimpedance that is less than the RF fixed source impedance, thetransformation circuit comprising: a transformation capacitor in serieswith the RF input; and a transformation inductor in parallel to the RFinput and coupled to a ground; a series inductor in series with the RFinput and coupled between the transformation capacitor and the RFoutput; a first shunt circuit in parallel to the RF input, the firstshunt circuit comprising: a first shunt variable capacitance componentcomprising (a) a plurality of first shunt capacitors coupled inparallel, and (b) a plurality of first shunt switches coupled to theplurality of first shunt capacitors and configured to connect anddisconnect each of the plurality of first shunt capacitors to a firstvirtual ground; a first shunt padding capacitor coupled in parallel toat least one of the plurality of first shunt capacitors, the first shuntpadding capacitor coupled to the first virtual ground; a first shuntground capacitor coupled between the first virtual ground and theground; and a first shunt resistor coupled between the first virtualground and the ground; a second shunt circuit in parallel to the RFoutput, the second shunt circuit comprising: a second shunt variablecapacitance component comprising (a) a plurality of second shuntcapacitors coupled in parallel, and (b) a plurality of second shuntswitches coupled to the plurality of second shunt capacitors andconfigured to connect and disconnect each of the plurality of secondshunt capacitors to a second virtual ground; a second shunt paddingcapacitor coupled in parallel to at least one of the plurality of secondshunt capacitors, the second shunt padding capacitor coupled to thesecond virtual ground; a second shunt ground capacitor coupled betweenthe second virtual ground and the ground; and a second shunt resistorcoupled between the second virtual ground and the ground; determining afirst shunt capacitance value for the first shunt variable capacitancecomponent and a second shunt capacitance value for the second shuntvariable capacitance component for creating an impedance match at an RFinput of the impedance matching network; and generating a control signalto cause the first shunt variable capacitance component to provide thefirst shunt capacitance value, or to cause the second shunt variablecapacitance component to provide the second shunt capacitance value.

In a third aspect of the present invention, a method of manufacturing asemiconductor includes placing a substrate in a plasma chamberconfigured to deposit a material layer onto the substrate or etch amaterial layer from the substrate; and energizing plasma within theplasma chamber by coupling RF power from an RF source into the plasmachamber to perform a deposition or etching, and while energizing theplasma: determining a variable load impedance of the plasma chamber,with an impedance matching network coupled between the load and the RFsource, wherein the RF source has a fixed RF source impedance, and theimpedance matching network comprises: an RF input configured to coupleto the RF source; an RF output configured to couple to the load; atransformation circuit coupled to the RF input and configured to providea transformed impedance that is less than the RF fixed source impedance,the transformation circuit comprising: a transformation capacitor inseries with the RF input; and a transformation inductor in parallel tothe RF input and coupled to a ground; a series inductor in series withthe RF input and coupled between the transformation capacitor and the RFoutput; a first shunt circuit in parallel to the RF input, the firstshunt circuit comprising: a first shunt variable capacitance componentcomprising (a) a plurality of first shunt capacitors coupled inparallel, and (b) a plurality of first shunt switches coupled to theplurality of first shunt capacitors and configured to connect anddisconnect each of the plurality of first shunt capacitors to a firstvirtual ground; a first shunt padding capacitor coupled in parallel toat least one of the plurality of first shunt capacitors, the first shuntpadding capacitor coupled to the first virtual ground; a first shuntground capacitor coupled between the first virtual ground and theground; and a first shunt resistor coupled between the first virtualground and the ground; a second shunt circuit in parallel to the RFoutput, the second shunt circuit comprising: a second shunt variablecapacitance component comprising (a) a plurality of second shuntcapacitors coupled in parallel, and (b) a plurality of second shuntswitches coupled to the plurality of second shunt capacitors andconfigured to connect and disconnect each of the plurality of secondshunt capacitors to a second virtual ground; a second shunt paddingcapacitor coupled in parallel to at least one of the plurality of secondshunt capacitors, the second shunt padding capacitor coupled to thesecond virtual ground; a second shunt ground capacitor coupled betweenthe second virtual ground and the ground; and a second shunt resistorcoupled between the second virtual ground and the ground; determining afirst shunt capacitance value for the first shunt variable capacitancecomponent and a second shunt capacitance value for the second shuntvariable capacitance component for creating an impedance match at an RFinput of the impedance matching network; and generating a control signalto cause the first shunt variable capacitance component to provide thefirst shunt capacitance value, or to cause the second shunt variablecapacitance component to provide the second shunt capacitance value.

Accordingly, an improved matching network, along with systems andmethods incorporating same, is disclosed. Advantages of the improvementswill be apparent from the drawings and the description of the preferredembodiment.

BRIEF DESCRIPTION OF THE DRAWINGS

The foregoing summary, as well as the following detailed description ofthe exemplary embodiments, will be better understood when read inconjunction with the appended drawings. It should be understood,however, that the invention is not limited to the precise arrangementsand instrumentalities shown in the following figures:

FIG. 1A is a schematic representation of a first embodiment of an RFimpedance matching network.

FIG. 1B is a representation of a first embodiment of a virtual ground.

FIG. 2 is a schematic representation of a second embodiment of an RFimpedance matching network.

FIG. 3 is a schematic representation of a third embodiment of an RFimpedance matching network.

FIG. 4 is a schematic representation of a fourth embodiment of an RFimpedance matching network.

FIG. 5 is a schematic representation of a fifth embodiment of an RFimpedance matching network.

FIG. 6 is a schematic representation of a sixth embodiment of an RFimpedance matching network.

FIG. 7 is a schematic representation of a seventh embodiment of an RFimpedance matching network.

FIG. 8 is a schematic representation of an eighth embodiment of an RFimpedance matching network.

FIG. 9 is a schematic representation of a ninth embodiment of an RFimpedance matching network.

FIG. 10 is a schematic representation of a tenth embodiment of an RFimpedance matching network.

DETAILED DESCRIPTION OF THE INVENTION

The description of illustrative embodiments according to principles ofthe present invention is intended to be read in connection with theaccompanying drawings, which are to be considered part of the entirewritten description. In the description of embodiments of the inventiondisclosed herein, where circuits are shown and described, one of skillin the art will recognize that for the sake of clarity, not alldesirable or useful peripheral circuits and/or components are shown inthe figures or described in the description. Moreover, the features andbenefits of the invention are illustrated by reference to the disclosedembodiments. Accordingly, the invention expressly should not be limitedto such disclosed embodiments illustrating some possible non-limitingcombinations of features that may exist alone or in other combinationsof features; the scope of the invention being defined by the claimsappended hereto.

As used throughout, ranges are used as shorthand for describing each andevery value that is within the range. Any value within the range can beselected as the terminus of the range. In addition, all references citedherein are hereby incorporated by reference in their entireties. In theevent of a conflict in a definition in the present disclosure and thatof a cited reference, the present disclosure controls.

In the embodiments of an RF impedance matching network disclosed herein,the matching network is configured as a “PI” type matching network. Bythis configuration, the switching of the variable capacitance componentsand variable inductance components (sometimes referred to collectivelyas variable components or reactive components) occurs in the shunt ofthe matching circuit. Thus, unlike in other matching networks, such as“L” type matching networks, the exemplified matching network switchesits reactive components to a ground and not in series. There are novariable inductors or capacitors in the series leg.

In these embodiments, an RF impedance matching network includes an RFinput configured to couple to an RF source, the RF source having a fixedRF source impedance; an RF output configured to couple to a load, theload having a variable load impedance; a transformation circuit coupledto the RF input and configured to provide a transformed impedance thatis less than the fixed source impedance; and a PI circuit having a firstshunt circuit in parallel to the RF input and a second shunt circuit inparallel to the RF input and the RF output. The first shunt circuitincludes a first shunt variable component providing a first variablecapacitance or inductance; and a first virtual ground coupled to thefirst shunt variable component and a ground. The second shunt circuitincludes a second shunt variable component providing a second variablecapacitance or inductance; and a second virtual ground coupled to thesecond shunt variable component and the ground.

In general, the circuit configurations are tailored to either aninductive or capacitive load impedance of the chamber. Whether oneconfigures a shunt circuit as an inductor or a capacitor will depend onfactors such as frequency of operation, power, and the appropriatephysical size of the element. For example, smaller inductors will beeasier to package and layout, with lower heat dissipation that is easierto control. Specific embodiments will be described in more detail below.

Turning in detail to the drawings, FIG. 1A illustrates an RF impedancematching network 100 according to a first embodiment of the invention.The matching network 100 includes an RF input 160 configured to coupleto an RF source 110, and an RF output 170 coupled to a load 120. Asensor 162 is coupled at the RF input 160 between the RF source 110 andthe matching network 100. In the exemplified embodiment, the load 120 isa plasma chamber for semiconductor device fabrication. The semiconductordevice can be microprocessor, a memory chip, or another type ofintegrated circuit or device. In other embodiments, the load 120 can beany load of variable impedance that can utilize an RF matching network.

In the exemplified embodiment, the RF impedance matching network 100serves to help maximize the amount of RF power transferred from the RFsource 110 to the plasma chamber 120 by matching the impedance at the RFinput 160 to the fixed impedance of the RF source 110. The matchingnetwork 100 can consist of a single module within a single housingdesigned for electrical connection to the RF source 110 and plasmachamber 120. In other embodiments, the components of the matchingnetwork 100 can be located in different housings, some components can beoutside of the housing, and/or some components can share a housing witha component outside the matching network 100.

As is known in the art, the plasma within a plasma chamber 120 typicallyundergoes certain fluctuations outside of operational control so thatthe impedance presented by the plasma chamber 120 is a variableimpedance. Since the variable impedance of the plasma chamber 120 cannotbe fully controlled, an impedance matching network may be used to createan impedance match between the plasma chamber 120 and the RF source 110.

Moreover, the impedance of the RF source 110 may be fixed at a set valueby the design of the particular RF source 110. Although the fixedimpedance of an RF source 110 may undergo minor fluctuations during use,due to, for example, temperature or other environmental variations, theimpedance of the RF source 110 is still considered a fixed impedance forpurposes of impedance matching because the fluctuations do notsignificantly vary the fixed impedance from the originally set impedancevalue. Other types of RF sources may be designed so that the impedanceof the RF source may be set at the time of, or during, use. Theimpedance of such types of RF sources is still considered fixed becauseit may be controlled by a user (or at least controlled by a programmablecontroller) and the set value of the impedance may be known at any timeduring operation, thus making the set value effectively a fixedimpedance.

The RF source 110 may be an RF generator of a type that is well-known inthe art to generate an RF signal at an appropriate frequency and powerfor the process performed within the plasma chamber 120. The RF source110 may be electrically connected to the RF input 160 of the RFimpedance matching network 100 using a coaxial cable or similar means,which for impedance matching purposes would have the same fixedimpedance as the RF source 110.

The plasma chamber 120 can include a first electrode and a secondelectrode, and in processes that are well known in the art, the firstand second electrodes, in conjunction with appropriate control systems(not shown) and the plasma in the plasma chamber 120, enable one or bothof deposition of materials onto a substrate and etching of materialsfrom the substrate.

The sensor 162 is configured to monitor the RF signal output from the RFsource 110. The sensor 162 can monitor an RF input parameter or multipleRF input parameters at the RF input 160. The sensor 162 can be anysensor configured to detect a parameter at the RF input 160. The inputparameter can be any parameter measurable at the RF input 160 sufficientfor operating the matching network 100. In the exemplified embodiment,the sensor 162 detects the voltage, current, and phase at the RF input160 of the matching network 100. The sensor 162 can provide analoginformation to a control unit 180, where it is converted to a digitalform. Based on the RF input parameter detected by the RF input sensor162, the control unit 180 can determine the variable load impedance. Thecontrol unit 180 can further calculate the necessary switching positionson the shunt legs such that the proper inductance and capacitance isprovided by the variable components 144, 154 for creating an impedancematch. That is, the control unit 180 can determine a first shuntcapacitance value for the first shunt variable capacitance component 144and a second shunt capacitance value for the second shunt variablecapacitance component 154 to create an impedance match at the RF input160. The control unit 180 can then send a control the driver circuit 185to alter a first shunt variable capacitance of the first shunt variablecapacitance component 144; and alter a second shunt variable capacitanceof the second shunt variable capacitance component 154 based on a secondcontrol signal received from the control unit 180. The match need not bea perfect matching of impedance. For example, an impedance match canresult in 10% or less RF power reflected back to the RF source.

Most of the inductive and capacitive components used in the discussedembodiments can be designed on a ceramic substrate or some othermaterial such as Rogers material that can withstand the temperatureexcursions. Particularly at higher power levels and large currents acapacitive array or/and inductive array may be specifically packaged tosatisfy the thermal issues associated with current passing through theshunt elements and series elements at higher power levels. Many of thesecomponents will be either air cooled or water cooled, depending on theparticular architecture used for a specific load.

Transformation Circuit

The matching network 100 of the exemplified embodiment includes both aPI circuit 135 and a transformation circuit 130. The fixed impedancetransformation circuit 130 is located at the front-end of the matchingnetwork 100. The transformation circuit 130 is coupled to the RF input160 and enables the impedance at cross-section A-A looking back towardRF input 160 to be lowered to a value that is less than the real part ofthe fixed RF source impedance, thus providing a desired loweredimpedance at the input of the PI circuit 135 (the PI circuit input 132)that is less than the fixed impedance of the RF source 110. In thisembodiment, the RF source impedance is fixed at 50 Ohms, and RF power istransmitted through coaxial cables which also have a fixed impedance of50 Ohms. In other embodiments, the fixed impedance can be of a differentvalue. In preferred embodiments, the lowered impedance is less than thereal part of the load impedance (R_(L)).

The transformation circuit 130 includes an inductor L1 (sometimesreferred to as a transformation inductor) and a capacitor C1 (sometimesreferred to as a transformation capacitor). In this embodiment, thetransformation inductor L1 is in series with the RF input 160, and thetransformation capacitor C1 is in parallel to the RF input 160 andcoupled to a chassis ground GND. In other embodiments, the configurationis reversed, with the capacitor in series with the RF input 160, and theinductor in parallel to the RF input 160 and coupled to the chassisground GND. The configuration chosen depends on the remaining PI circuit135 and the configuration that prevents the DC component of the load 120returning to the RF source 110. The transformation circuit 130 isconnected to a chassis ground GND (not the virtual grounds, which willbe discussed below). In other embodiments, the chassis ground GND can beanother type of ground.

In the exemplified embodiment, the transformation circuit 130 isconfigured to lower the impedance from 50 Ohms at the RF input 160 toapproximately 15 Ohms at the PI circuit input 132 (the input of the PIcircuit 135), with no imaginary part (or minimal imaginary part). Thus,for example, the output impedance (Z_(o)) of the transformation circuit130 is approximately 15 Ohms+j0. The PI circuit 135 of the matchingnetwork 100 is designed for this reduced input impedance, referred to asZ_(in) in FIGS. 1A-10. The interface between the output of thetransformation circuit 130 and the PI circuit 135 is designated by lineA-A.

The transformation circuit 130 can lower the voltage stresses on thematching network 100. Thus, high voltage stress on switches S11 to S1Nand S21 to S2N will be lowered. Such lowered stress enhances thefunctioning of switches such as RF FET switches, PIN diodes, andinsulated-gate bipolar transistors (IGBTs).

This lowered stress can be better understood by the following examples.In the first example, there is no transformation circuit. A 5,000 WattsRF generator (RF source) has a 50 Ohms output impedance (R_(source)) anda frequency of 27.12 MHz that is provided at the RF input 160 of thematching network 100. The matching network 100 is perfectly tuned to 50Ohms at its input and has no reactive components present. The voltage(V=√{square root over (P)}R) therefore will be √{square root over ((5000W)(50 Ohms)))}{square root over ((5000 W)(50 Ohms)))} or 500 V rms. Thecurrent (I=V/R) will be 500 V rms/50 Ohms, or 10 A rms.

In the second example, a transformation circuit lowers the impedanceprovided at the input 132 of the PI circuit 135 to 15 Ohms. The voltage(V=√{square root over (P)}R) will now be √{square root over ((5000 W)(15Ohms)))}{square root over ((5000 W)(15 Ohms)))} or 273.9 V rms, and thecurrent (I=V/R) will be 273.9 V rms/15 Ohms, or 18.3 A rms. Thus, thecurrent increases by a factor of 1.83, while the voltage decreases by afactor of 1.83. The active components of the PI circuit 135 more easilyhandle current than voltage. Thus, the transformation circuit'sreduction of voltage causes less stress on the active components. Adesigner can choose for his convenience appropriate impedance reductionfactor. That reduction factor depends on chamber load impedance and itsreal part (Z_(L)=R_(L)+/−jX_(L)). In preferred embodiments, the reducedinput impedance Z_(in) is less than the real part of the load impedance(R_(L)).

PI Circuit

The PI circuit 135 of FIG. 1A includes a series capacitor C3 in serieswith the RF input 160 and coupled between the transformation inductor L1and the RF output 170. The series capacitor C3 can decouple the DCcomponent to help prevent the DC component of the load 120 fromreturning to the RF source 110. The PI circuit 135 further includes aseries inductor L2 in series with the RF input 160 and coupled betweenthe series capacitor C3 and the RF output 170. The PI circuit 135further includes a first shunt circuit 140 in parallel to the RF input160 and a second shunt circuit 150 parallel to the RF input 160.

The first shunt circuit 140 includes a first shunt capacitor C_(DC) anda first shunt padding inductor L3 _(P). The first shunt capacitor C_(DC)can decouple the DC component of the plasma coming back toward theswitches S11, S12, S1N, such that the switches are not burdened withlarge components of the DC voltage. The first shunt circuit 140 furtherincludes a first shunt variable inductive component 144 comprising (a) aplurality of first shunt inductors L31, L32, L32 coupled in parallel tothe first shunt padding inductor L3 _(P), and (b) a plurality of firstshunt switches S11, S12, S1N coupled to the plurality of first shuntinductors L31, L32, L32 and configured to connect and disconnect each ofthe plurality of first shunt inductors L31, L32, L32 to a first virtualground 142. Also included is a first shunt ground capacitor C1 _(gnd)coupled between the second virtual ground and the ground GND. The firstshunt ground capacitor C1 _(gnd) and a first shunt ground inductanceinherent to the first virtual ground 142 can resonate in series toprovide the lowest possible impedance from the virtual ground to theground GND. The first shunt circuit 140 further includes a first shuntgalvanic return resistor R1 _(G) coupled between the first virtualground 142 and the ground GND. The first shunt ground capacitor C1_(gnd) and the first shunt galvanic return resistor R1 _(G) are coupledin parallel.

The second shunt circuit 150 includes a second shunt variablecapacitance component 154 comprising (a) a plurality of second shuntcapacitors C21, C22, C2N coupled in parallel, and (b) a plurality ofsecond shunt switches S21, S22, S2N coupled to the plurality of secondshunt capacitors C21, C22, C2N and configured to connect and disconnecteach of the plurality of second shunt capacitors C21, C22, C2N to asecond virtual ground 152. The circuit further includes a paddingcapacitor C2 _(P) coupled in parallel to at least one of the pluralityof second shunt capacitors C21, C22, C2N, the padding capacitor C2 _(P)coupled to the second virtual ground 152. The circuit further includes asecond shunt ground capacitor C2 _(gnd) coupled between the secondvirtual ground 152 and the ground GND, and a second shunt galvanicreturn resistor R2 _(G) coupled between the second virtual ground 152and the ground GND. The second shunt ground capacitor C2 _(gnd) and thefirst shunt galvanic return resistor R2 _(G) are coupled in parallel.The capacitors, inductors, and resistors discussed herein can refer toany components of suitable design to provide capacitance, inductance,and resistance, respectively. In preferred embodiments, the matchingnetwork is designed such that, for a particular load, there is minimalpossible variation of capacitors and inductors, thereby allowing thefewest possible switches. Padding capacitors and padding inductors arecapacitors and inductors that do not need to be switched.

The variable inductance components discussed herein can refer to aplurality of shunt inductors and coupled switches, and is sometimesreferred to as an inductive array or simply a variable inductor.Similarly, the variable capacitance components discussed herein canrefer to a plurality of shunt capacitors and coupled switches, and issometimes referred to as a capacitive array or simply as a variablecapacitor. A variable inductance component can refer to any structurecapable of providing a variable inductance, and a variable capacitancecomponent can refer to any structure capable of providing a variablecapacitance. For example, the variable capacitance component can be anelectronic variable capacitor (EVC), as described in U.S. Pat. No.7,251,121. By these components, the capacitances and inductancesprovided in the shunt legs can be controlled such that the combinedimpedances of the RF impedance matching network 100 and the plasmachamber match, or at least substantially match, the fixed impedance ofthe RF source 110. A first shunt variable inductance component 144 and asecond shunt variable capacitance component 154 are shown in FIG. 1A.

Virtual Ground

As discussed above, the switches are not connected directly to chassisground GND but to a virtual ground 142, 152. FIG. 1B shows an embodimentof the first virtual ground 142. The same or a similar structure can beused for virtual ground 152 and the other virtual grounds disclosedherein. In the exemplified embodiment of FIG. 1B, the virtual ground 142is an aluminum plate with embedded tubes 147. The virtual ground 142 iswater cooled, with water (H₂O) flowing in and out of the embedded tubes147. The virtual ground can include thermally conductive isolation padsor paste between the virtual ground surface 145 and the chassis GND toconduct heat and to separate the virtual ground from the chassis groundGND. The pad 143 is not electrically conductive. In other embodiments,the virtual ground 142, 152 can be any electrically conductive componentthat is physically separated from a ground. For example, the virtualground can be arranged vertically or include fins. Further, the virtualground can include other cooling means. For example, at low powerapplications, the virtual ground can be air cooled. Standard heatsinking methods can be applied.

In the exemplified embodiment of FIG. 1B, nine switches S11-S19 aremounted on the surface 145 of the virtual ground 142. The nine switchesS11-S19 correspond with switches S11, S12, and S1N of FIG. 1A, since the“N” can refer to any total number of switches (or any total number ofinductors or capacitors as “N” is used elsewhere in the drawings). Inother embodiments, more or less switches can be used, depending on therequired accuracy of the variable inductance (or variable capacitance inother embodiments).

Switchable and padding components L31-L39 and L3 _(P) (corresponding toL31, L32, L3N, L3 _(P) of FIG. 1A) can also be mounted on the surface145 of the first virtual ground 142, as shown in FIG. 1B. Theexemplified embodiment uses nine switchable inductors, though, as withthe switches discussed above, any number of switchable inductors (orswitchable capacitors depending on the embodiment) can be used. Further,the other virtual grounds disclosed herein can be configured similarly.Thus, the switchable and padding components C21, C22, C2N, C2 _(P) ofthe second shunt circuit 150 can be mounted on a surface of the secondvirtual ground 152 in a manner similar to the surface 145 of virtualground 142 shown in FIG. 1B. Further, similar virtual grounds can beused for the matching network embodiments shown in FIGS. 2-10. Forexample, virtual ground 242 of FIG. 2 can use a virtual groundconfiguration similar to that shown in FIG. 1B, but where capacitorsC11, C12, C1N, C1 _(P) are mounted on the surface of the virtual ground242 instead of inductors L31-L39 and L3 _(P).

As shown in FIG. 1A, the virtual ground 142, 152 can be connected to acommon RF chassis ground GND via a ground capacitor C1 _(gnd), C2_(gnd). The virtual ground 142, 152 has an inherent inductance (L_(gnd))that is generally small. This inherent inductance can connect in serieswith the ground capacitor to create a series resonant circuit. Theseries resonant circuit acts as a short at the frequency of operation.There is also a galvanic return resistor designated as R1 _(G) or R2_(G) that has a much larger value than the series resonance impedance ofL_(gnd) and C_(gnd). Thus, the galvanic connection does not pass themain RF current.

By using a virtual ground for each shunt circuit of variable components,each branch return of RF-switched current can go to one point ground.Since the shunt branch RF current can be very large, they will be mucheasier to control and to stream them away from, for example, FET gatedriving low voltage circuitry. Further, noise immunity and RFinterference within the matching network will be much easier to control.

By the virtual ground, the switches in a shunt circuit can be connectedto a platform from which heat can be better controlled and extracted ifneeded. The RF currents flowing from the tuning capacitors or inductors(e.g., L31, S21) will always flow into the virtual ground 142. Thevirtual ground 142 can also reduce the coupling capacitance from theback side of the switches and their respective FETs to a ground. Eachvariable capacitive or inductive component 144, 154 can have a separatevirtual ground 142, 152 to further reduce the capacitive cross talkamong the switches. The separation of switched currents in the virtualground can help reduce the jitter noise in the switches as well as crosstalk among the switches. These currents can be very difficult to controlat very high RF power levels. The virtual ground can ease the design ofhigh power switches.

After full layout of the circuit, one can determine the inductance ofthe ground connections. A capacitance can be determined for some verysmall impedance from virtual ground to the chassis ground GND bycalculating the needed capacitance C_(gnd). In a preferred embodiment,the capacitor C_(gnd) has a very low ESR (equivalent series resistance)and should withstand several kilovolts of voltage breakdown in case ofovervoltage occurrence on the RF switches. Choosing the propercomponents can prevent the network from being under high voltage stress.The embodiment shown in FIG. 1A is useful for an inductive load chamberand powers below 5 kW.

In the matching network 100 of FIG. 1A and certain other embodimentsdiscussed hereafter, a bypass capacitor C_(DC) (or C4) forms part of theshunt circuit 140 for the purpose of decoupling the DC voltage that maybe reflected from the chamber load 120. This capacitance is not part ofthe matching network 100 in that this capacitance is not used formatching purposes. The capacitor C_(DC) can sustain high voltage swingscoming back from the load 120 and can pass very large RF currents. Forinstance, at RF power P=5 kW, these currents may be in the order of 100A rms. The bypass capacitor C_(DC) can be in series with the variableshunt inductance and can prevent the DC voltage returning from thechamber 120 from reaching the RF switches.

In the exemplified embodiment, the switches use field effect transistors(FETs). In other embodiments, the switches use PIN/NIP diodes, a MicroElectro Mechanical (MEM) switch, a solid state relay, bipolartransistors, insulated-gate bipolar transistors (IGBTs), and the like.In the exemplified embodiment, each switch turns a capacitor or inductorON or OFF to control the overall capacitance or inductance provided bythe variable components 144, 154, thus enabling the matching network 100to provide variable capacitance and variable inductance in the shuntlegs. In alternative embodiments, a switch can be configured to controlmore than one capacitor or inductor.

The matching network 100 includes one or more RF switch driver circuits185. The driver circuits 185 are configured to switch the plurality ofswitches S11, S12, S1N, S21, S22, S2N. Each of the driver circuits 185can include several discrete driving circuits, with each discretedriving circuit configured to switch one of the switches.

The matching network 100 further includes a control unit 180. Thecontrol unit 180 is the brains of the RF impedance matching network 100as it receives multiple inputs from sources such as the sensor 162 andthe driver circuits 185 and makes calculations necessary to determinechanges to the variable capacitance and inductance components 144, 154,and delivers commands to these components 144, 154 to create theimpedance match. The control unit 180 can be of the type that iscommonly used in semiconductor fabrication processes, and thereforeknown to those of skill in the art.

The control unit 180 can be configured with an appropriate processorand/or signal generating circuitry to provide an input signal forcontrolling the driver circuits 185. The control unit 180 of thematching network 100 can be a standard DSP- and FPGA-based architecture.The control unit 180 can house several other circuits, including anovervoltage conditioning circuit 182 for switching off all the activeswitches in the case of overvoltage at the output of the match. Theovervoltage circuit 182 can indicate to the control board when to gointo the shutdown condition.

In the exemplified embodiment, the control unit 180 includes aprocessor. The processor may be any type of properly programmedprocessing device, such as a computer or microprocessor, configured forexecuting computer program instructions (e.g. code). The processor maybe embodied in computer and/or server hardware of any suitable type(e.g. desktop, laptop, notebook, tablets, cellular phones, etc.) and mayinclude all the usual ancillary components necessary to form afunctional data processing device including without limitation a bus,software and data storage such as volatile and non-volatile memory,input/output devices, graphical user interfaces (GUIs), removable datastorage, and wired and/or wireless communication interface devicesincluding Wi-Fi, Bluetooth, LAN, etc. The processor of the exemplifiedembodiment is configured with specific algorithms to enable matchingnetwork 100 to perform the functions described herein.

A power supply (not shown) can be connected to the driver circuits 185,control unit 180, and sensor 162 to provide operational power, at thedesigned currents and voltages, to each of these components.

The inductive and capacitive shunt designs in the PI configurationenable low voltage stresses on the variable components. High voltagestress is particularly hard on active FET switches that must switchlarge potentials as well as large currents at the power levels on theorder of 5 kW. Since the disclosed embodiments do not switch any seriescomponents in these PI configurations, they are fixed in this matchingnetwork 100, and therefore there are lower voltages on the shuntcapacitive or inductive components. This will be shown later in atabular form.

At lower frequencies the inductors may be discrete since they will haveinherently larger values. At higher frequencies such as 13.56 MHz, 27.12MHz, 40.68 MHz, and 60 MHz, the inductors can be made by a method calledspiral inductors and printed on a ceramic substrate.

FIG. 2 is a schematic representation of a second embodiment of an RFimpedance matching network 200. As will be described, this embodimentuses variable capacitance components 244, 254 in both shunt legs. As inFIG. 1A, the matching network 200 includes an RF input 260 configured tocouple to an RF source 210 and an RF output 170 configured to couple toa load 220, a transformation circuit 230, and a PI circuit 235.

The transformation circuit 230 is again coupled to the RF input 260 andconfigured to provide a transformed impedance that is less than thefixed source impedance. The transformation capacitor C1, however, is inseries with the RF input 260, and the transformation inductor L1 is inparallel to the RF input and coupled to the chassis ground GND.

The first shunt circuit 240 is in parallel to the RF input 260. Thecircuit 240 includes a first shunt variable capacitance component 244comprising (a) a plurality of first shunt capacitors C11, C12, C1Ncoupled in parallel, and (b) a plurality of first shunt switches S11,Si, S13 coupled to the plurality of first shunt capacitors C11, C12, C1Nand configured to connect and disconnect each of the plurality of firstshunt capacitors C11, C12, C1N to a first virtual ground 242. The firstshunt circuit 240 further includes a padding capacitor C1 _(P) (“firstshunt padding capacitor”) coupled in parallel to at least one of theplurality of first shunt capacitors C11, C12, C1N, the first shuntpadding capacitor C1 _(P) coupled to the first virtual ground 242; acapacitor C1 _(gnd) (“first shunt ground capacitor”) coupled between thefirst virtual ground 242 and the ground GND; and a resistor R1 _(G)(“first shunt galvanic return resistor”) coupled between the firstvirtual ground 242 and the ground GND.

The second shunt circuit 250 is also in parallel to the RF input 260.Similar to the first shunt circuit 240, the second shunt circuit 250includes a second shunt variable capacitance component 254 comprising(a) a plurality of second shunt capacitors C21, C22, C2N coupled inparallel, and (b) a plurality of second shunt switches S21, S22, S2Ncoupled to the plurality of second shunt capacitors C21, C22, C2N andconfigured to connect and disconnect each of the plurality of secondshunt capacitors C21, C22, C2N to a second virtual ground 252. Thesecond shunt circuit 250 further includes a padding capacitor C2 _(P)(“second shunt padding capacitor”) coupled in parallel to at least oneof the plurality of second shunt capacitors C21, C22, C2N, the secondshunt padding capacitor C2 _(P) coupled to the second virtual ground252; a capacitor C2 _(gnd) (“second shunt ground capacitor”) coupledbetween the second virtual ground 252 and the ground GND; and a resistorR2 _(G) (“second shunt galvanic return resistor”) coupled between thesecond virtual ground 252 and the ground GND.

The matching network 200 further includes a series inductor L2 in serieswith the RF input 260 and coupled between the transformation capacitorC1 and the RF output 270. The embodiment of the matching network 200shown in FIG. 2 is useful for inductive and capacitive loads. Since ithas only one inductor in the series leg, it is efficient. It is usefulfor high power applications that are less than 10 kW.

FIG. 3 is a schematic representation of a third embodiment of an RFimpedance matching network 300. In this embodiment, variable inductors344, 354 are used in both shunt legs. As in the previous figures, thematching network 300 includes an RF input 360 configured to couple to anRF source 310 and an RF output 370 configured to couple to a load 320, atransformation circuit 330, and a PI circuit 335.

Similar to the embodiment shown in FIG. 1A, the transformation inductorL1 is in series with the RF input 360, and the transformation capacitorC1 is in parallel to the RF input 360 and coupled to a chassis groundGND. Also similar to FIG. 1A, the first shunt circuit 340 includes afirst shunt padding inductor L3 _(P); a plurality of first shuntinductors L31, L32, L3N coupled in parallel to the first shunt paddinginductor L3 _(P); a plurality of first shunt switches S11, S12, S1Ncoupled to the plurality of first shunt inductors L31, L32, L3N andconfigured to connect and disconnect each of the plurality of firstshunt inductors L31, L32, L3N to a first virtual ground 342; a firstshunt ground capacitor C1 _(gnd) coupled between the second virtualground 352 and the ground GND; and a first shunt galvanic returnresistor R1 _(G) coupled between the first virtual ground 342 and theground GND. The second shunt circuit 350 is configured similar to thefirst shunt circuit 340. The matching network 300 further includes afirst series capacitor and a second series capacitor coupled in seriesbetween the RF input 360 and the RF output 370.

The embodiment of the matching network 300 shown in FIG. 3 has only oneinductor in the series leg and therefore is more efficient. It is usefulfor high power applications up to more than 5 kW. It is useful forinductive loads.

FIG. 4 is a schematic representation of a fourth embodiment of an RFimpedance matching network 400. This embodiment is similar to theembodiment shown in FIG. 3, however, the first series capacitor C2 iscoupled between the RF input 460 and the first shunt circuit 440, thesecond series capacitor C3 is coupled between the first shunt circuit440 and the second shunt circuit 450, and a single capacitor C4 iscoupled in series with the padding inductor L4 _(P) in the second shuntcircuit 450. The embodiment of the matching network 400 shown in FIG. 4has only one inductor in the series leg and therefore is useful inhigher power matching designs, up to approximately 10 kW. The seriescapacitor C3 is moved away from high current in the load loop, whichimproves efficiency and therefore usefulness for high RF power matching.

FIG. 5 is a schematic representation of a fifth embodiment of an RFimpedance matching network 500. This embodiment is similar to theembodiment shown in FIG. 1A, however, the series inductor L2 is replacedwith a series capacitor C3, a series inductor L4 is added, and singlecapacitor C_(DC) in the first shunt circuit 140 of FIG. 1A iseliminated. The embodiment of the matching network 500 shown in FIG. 5is useful at lower powers up to 5 kW.

FIG. 6 is a schematic representation of a sixth embodiment of an RFimpedance matching network 600. This embodiment is similar to theembodiment shown in FIG. 1A, however, the inductor L1 and capacitor C1of the transformation circuit 630 are reversed, the series capacitor C3of FIG. 1A is eliminated, and the positioning of the first and secondshunt circuit 650s is reversed, such that the first shunt circuit 640has the plurality of switching capacitors C21, C22, C2N, and the secondshunt circuit 650 has the plurality of switching inductors L41, L42,L4N. The embodiment of the matching network 600 shown in FIG. 6 isuseful for medium-to-high powers and inductive loads. Since it has onlyone inductor in the series leg, it can provide good efficiency.

FIG. 7 is a schematic representation of a seventh embodiment of an RFimpedance matching network 700. This embodiment is similar to theembodiment shown in FIG. 2, however, a series inductor L3 is coupledbetween the transformation capacitor C1 and the first shunt circuit 740.The embodiment of the matching network 700 shown in FIG. 7 has twoinductors in the series leg, and therefore is used for lower powersbelow 5 kW.

FIG. 8 is a schematic representation of an eighth embodiment of an RFimpedance matching network 800. This embodiment is similar to theembodiment shown in FIG. 6, however, the inductor L1 and capacitor C1 ofthe transformation circuit 830 are reversed, a series inductor L2 isadded between the transformation inductor L1 and the first shunt circuit840, and the series inductor L2 between the first and second shuntcircuits 840, 850 is replaced with a series capacitor C3. The embodimentof the matching network 800 shown in FIG. 8 is useful for capacitivechamber loads. There are two inductors in the series leg and it isuseful for applications below 5 kW.

FIG. 9 is a schematic representation of a ninth embodiment of an RFimpedance matching network 900. This embodiment is similar to theembodiment shown in FIG. 2, however, an additional series inductor L3 iscoupled between the second shunt circuit 950 and the RF output 970. Theembodiment of the matching network 900 shown in FIG. 9 is useful forcapacitive chamber loads. There are two inductors in the series leg andtherefore more losses. It is useful for applications below 5 kW.

FIG. 10 is a schematic representation of a tenth embodiment of an RFimpedance matching network 1000. This embodiment is similar to theembodiment shown in FIG. 8, however, the series inductor L3 is coupledbetween the first shunt circuit 1040 and the second shunt circuit 1050,and the series capacitor C3 is coupled between the second shunt circuit1050 and the RF output 1070. The embodiment of the matching network 1000shown in FIG. 10 is useful for inductive chamber loads and formedium-to-low RF power applications. It is noted that, where componentsin one embodiment are similarly situated to components in anotherembodiment, the function and characteristics of those components can besimilar, though a detailed discussion of those components is notrepeated for that particular embodiment.

In Table 1, simulated results for typical matching conditions are shownfor the matching network 100 shown in FIG. 1A. The impedance loadconditions are assumed as typical chamber impedances. Values for seriescoupling capacitor C3 (2 nF) and series inductance L2 (8 uH) werespecifically chosen to satisfy the circuit equations under the matchingconditions. R_(L) is representative of the real part of the loadimpedance. P_(out) is the delivered RF power to the load resistor R_(L).The example components were chosen for delivering 5 kW of RF power to aplasma chamber. The simulations show that the matching network cansatisfy all the load impedance conditions for a typical process.

TABLE 1 Matching Network of FIG. 1A Simulation Results. L31, C21, L32,C22, L3N L2 C2N I_(C3) I_(L2) I_(L) V_(L) R_(L) X_(L) C3 (var.) (fixed)(var.) A, A, A, kV, P_(out) Ω Ω nF uH uH pF rms rms rms rms kW 1 31 22.52 8 3,080 9.8 15.33 66.4 1.56 5 2 38 2 3.05 8 2,640 11.3 13.3 45 1.365 5 39 2 5 8 2,400 9.9 8.03 30.5 0.812 5.8 10 39 2 5 8 2,300 13.3 6.8 200.691 5.08

Software was used to determine the circuit components values for thevariable shunt elements L3, C2 using the assigned load impedance values.The software then calculated the currents and voltages. As is shown, thematching network can be designed with reasonable values for thecapacitors and inductors. The simulation was carried out at thefrequency f=2 MHz, and therefore the components values reflect thatfrequency. The assumed power was 5 kW. One could choose other value forthe variable shunt elements L3, C2 to attempt to have even smallercurrents and voltages in the variable shunt elements L3, C2.

While the invention has been described with respect to specific examplesincluding presently preferred modes of carrying out the invention, thoseskilled in the art will appreciate that there are numerous variationsand permutations of the above described systems and techniques. It is tobe understood that other embodiments may be utilized and structural andfunctional modifications may be made without departing from the scope ofthe present invention. Thus, the spirit and scope of the inventionshould be construed broadly as set forth in the appended claims.

What is claimed is:
 1. An RF impedance matching network comprising: anRF input configured to couple to an RF source, the RF source having afixed RF source impedance; an RF output configured to couple to a load,the load having a variable load impedance; a transformation circuitcoupled to the RF input and configured to provide a transformedimpedance that is less than the RF fixed source impedance, thetransformation circuit comprising: a transformation capacitor in serieswith the RF input; and a transformation inductor in parallel to the RFinput and coupled to a ground; a series inductor in series with the RFinput and coupled between the transformation capacitor and the RFoutput; a first shunt circuit in parallel to the RF input, the firstshunt circuit comprising: a first shunt variable capacitance componentcomprising (a) a plurality of first shunt capacitors coupled inparallel, and (b) a plurality of first shunt switches coupled to theplurality of first shunt capacitors and configured to connect anddisconnect each of the plurality of first shunt capacitors to a firstvirtual ground; a first shunt padding capacitor coupled in parallel toat least one of the plurality of first shunt capacitors, the first shuntpadding capacitor coupled to the first virtual ground; a first shuntground capacitor coupled between the first virtual ground and theground; and a first shunt resistor coupled between the first virtualground and the ground; a second shunt circuit in parallel to the RFoutput, the second shunt circuit comprising: a second shunt variablecapacitance component comprising (a) a plurality of second shuntcapacitors coupled in parallel, and (b) a plurality of second shuntswitches coupled to the plurality of second shunt capacitors andconfigured to connect and disconnect each of the plurality of secondshunt capacitors to a second virtual ground; a second shunt paddingcapacitor coupled in parallel to at least one of the plurality of secondshunt capacitors, the second shunt padding capacitor coupled to thesecond virtual ground; a second shunt ground capacitor coupled betweenthe second virtual ground and the ground; and a second shunt resistorcoupled between the second virtual ground and the ground.
 2. Theimpedance matching network of claim 1 further comprising a sensorconfigured to measure at least one RF input parameter at the RF input.3. The impedance matching network of claim 2 wherein the at least one RFinput parameter is a voltage, a current, and a phase at the RF input. 4.The impedance matching network of claim 3 further comprising a controlunit configured to receive a signal from the sensor indicative of the atleast one RF input parameter, the control unit further configured todetermine the variable load impedance based on the RF input parameter.5. The impedance matching network of claim 4 wherein the control unit isfurther configured to determine a first shunt capacitance value for thefirst shunt variable capacitance component and a second shuntcapacitance value for the second shunt variable capacitance component tocreate an impedance match at the RF input.
 6. The impedance matchingnetwork of claim 5 further comprising at least one driver circuitconfigured to: alter a first shunt variable capacitance of the firstshunt variable capacitance component based on a first control signalreceived from the control unit; and alter a second shunt variablecapacitance of the second shunt variable capacitance component based ona second control signal received from the control unit.
 7. The impedancematching network of claim 6 wherein the impedance match results in 10%or less RF power reflected back to the RF source.
 8. A method ofmatching an impedance, the method comprising: determining a variableload impedance of a load, with an impedance matching network coupledbetween the load and an RF source, wherein the RF source has a fixed RFsource impedance, and the impedance matching network comprises: an RFinput configured to couple to the RF source; an RF output configured tocouple to the load; a transformation circuit coupled to the RF input andconfigured to provide a transformed impedance that is less than the RFfixed source impedance, the transformation circuit comprising: atransformation capacitor in series with the RF input; and atransformation inductor in parallel to the RF input and coupled to aground; a series inductor in series with the RF input and coupledbetween the transformation capacitor and the RF output; a first shuntcircuit in parallel to the RF input, the first shunt circuit comprising:a first shunt variable capacitance component comprising (a) a pluralityof first shunt capacitors coupled in parallel, and (b) a plurality offirst shunt switches coupled to the plurality of first shunt capacitorsand configured to connect and disconnect each of the plurality of firstshunt capacitors to a first virtual ground; a first shunt paddingcapacitor coupled in parallel to at least one of the plurality of firstshunt capacitors, the first shunt padding capacitor coupled to the firstvirtual ground; a first shunt ground capacitor coupled between the firstvirtual ground and the ground; and a first shunt resistor coupledbetween the first virtual ground and the ground; a second shunt circuitin parallel to the RF output, the second shunt circuit comprising: asecond shunt variable capacitance component comprising (a) a pluralityof second shunt capacitors coupled in parallel, and (b) a plurality ofsecond shunt switches coupled to the plurality of second shuntcapacitors and configured to connect and disconnect each of theplurality of second shunt capacitors to a second virtual ground; asecond shunt padding capacitor coupled in parallel to at least one ofthe plurality of second shunt capacitors, the second shunt paddingcapacitor coupled to the second virtual ground; a second shunt groundcapacitor coupled between the second virtual ground and the ground; anda second shunt resistor coupled between the second virtual ground andthe ground; determining a first shunt capacitance value for the firstshunt variable capacitance component and a second shunt capacitancevalue for the second shunt variable capacitance component for creatingan impedance match at an RF input of the impedance matching network; andgenerating a control signal to cause the first shunt variablecapacitance component to provide the first shunt capacitance value, orto cause the second shunt variable capacitance component to provide thesecond shunt capacitance value.
 9. The method of claim 8 furthercomprising a sensor configured to measure at least one RF inputparameter at the RF input.
 10. The method of claim 9 wherein the atleast one RF input parameter is a voltage, a current, and a phase at theRF input.
 11. The method of claim 10 wherein the control signal is sentby a control unit, the control unit configured to receive a signal fromthe sensor indicative of the at least one RF input parameter, anddetermine the variable load impedance based on the RF input parameter.12. The method of claim 11 wherein the control unit is furtherconfigured to determine the first shunt capacitance value for the firstshunt variable capacitance component and the second shunt capacitancevalue for the second shunt variable capacitance component.
 13. Themethod of claim 12 wherein the matching network further comprises atleast one driver circuit configured to: alter a first shunt variablecapacitance of the first shunt variable capacitance component based on afirst control signal received from the control unit; and alter a secondshunt variable capacitance of the second shunt variable capacitancecomponent based on a second control signal received from the controlunit.
 14. The method of claim 13 wherein the impedance match results in10% or less RF power reflected back to the RF source.
 15. A method ofmanufacturing a semiconductor comprising: placing a substrate in aplasma chamber configured to deposit a material layer onto the substrateor etch a material layer from the substrate; and energizing plasmawithin the plasma chamber by coupling RF power from an RF source intothe plasma chamber to perform a deposition or etching, and whileenergizing the plasma: determining a variable load impedance of theplasma chamber, with an impedance matching network coupled between theload and the RF source, wherein the RF source has a fixed RF sourceimpedance, and the impedance matching network comprises: an RF inputconfigured to couple to the RF source; an RF output configured to coupleto the load; a transformation circuit coupled to the RF input andconfigured to provide a transformed impedance that is less than the RFfixed source impedance, the transformation circuit comprising: atransformation capacitor in series with the RF input; and atransformation inductor in parallel to the RF input and coupled to aground; a series inductor in series with the RF input and coupledbetween the transformation capacitor and the RF output; a first shuntcircuit in parallel to the RF input, the first shunt circuit comprising:a first shunt variable capacitance component comprising (a) a pluralityof first shunt capacitors coupled in parallel, and (b) a plurality offirst shunt switches coupled to the plurality of first shunt capacitorsand configured to connect and disconnect each of the plurality of firstshunt capacitors to a first virtual ground; a first shunt paddingcapacitor coupled in parallel to at least one of the plurality of firstshunt capacitors, the first shunt padding capacitor coupled to the firstvirtual ground; a first shunt ground capacitor coupled between the firstvirtual ground and the ground; and a first shunt resistor coupledbetween the first virtual ground and the ground; a second shunt circuitin parallel to the RF output, the second shunt circuit comprising: asecond shunt variable capacitance component comprising (a) a pluralityof second shunt capacitors coupled in parallel, and (b) a plurality ofsecond shunt switches coupled to the plurality of second shuntcapacitors and configured to connect and disconnect each of theplurality of second shunt capacitors to a second virtual ground; asecond shunt padding capacitor coupled in parallel to at least one ofthe plurality of second shunt capacitors, the second shunt paddingcapacitor coupled to the second virtual ground; a second shunt groundcapacitor coupled between the second virtual ground and the ground; anda second shunt resistor coupled between the second virtual ground andthe ground; determining a first shunt capacitance value for the firstshunt variable capacitance component and a second shunt capacitancevalue for the second shunt variable capacitance component for creatingan impedance match at an RF input of the impedance matching network; andgenerating a control signal to cause the first shunt variablecapacitance component to provide the first shunt capacitance value, orto cause the second shunt variable capacitance component to provide thesecond shunt capacitance value.
 16. The method of claim 15 furthercomprising a sensor configured to measure at least one RF inputparameter at the RF input.
 17. The method of claim 16 wherein the atleast one RF input parameter is a voltage, a current, and a phase at theRF input.
 18. The method of claim 17 wherein the control signal is sentby a control unit, the control unit configured to receive a signal fromthe sensor indicative of the at least one RF input parameter, anddetermine the variable load impedance based on the RF input parameter.19. The method of claim 18 wherein the control unit is furtherconfigured to determine the first shunt capacitance value for the firstshunt variable capacitance component and the second shunt capacitancevalue for the second shunt variable capacitance component.
 20. Themethod of claim 19 wherein the matching network further comprises atleast one driver circuit configured to: alter a first shunt variablecapacitance of the first shunt variable capacitance component based on afirst control signal received from the control unit; and alter a secondshunt variable capacitance of the second shunt variable capacitancecomponent based on a second control signal received from the controlunit.